FABRICATION TECHNIQUE OF MICRO ELECTRO MECHANICAL SYSTEMS AND ITS RESEARCH PROGRESS

The microfabrication technique of Micro Electro Mechanical Systems（MEMS） is concisely introduced, which mainly includes micromachining techniques for silica surface and silica body, photolithograph, electroform, LIGA technique, quasi LIGA technique and rapid prototyping technique. The research progress of these techniques is also described.